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Primary Examiner: Williams, Howard S.
Assistant Examiner:
Attorney: Carlson; Dean E., Waltersheid; Edward C.

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Title: Purification of silane via laser-induced chemistry

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Claims: What we claim is:

1. A method of purifying silane which comprises (a) irradiating said silane with ultraviolet radiation of sufficient intensity to photolyze impurities therein, and (b) removing the photolysis products from said silane.

2. The method of claim 1 wherein said ultraviolet radiation is in the spectral range of 190 to 202 nm.

3. The method of claim 2 wherein said ultraviolet radiation is 193 nm radiation from an ArF laser.

4. The method of claim 1 wherein said silane is cooled before it is irradiated.

5. A method of removing PH.sub.3, AsH.sub.3, and B.sub.2 H.sub.6 from silane which comprises (a) irradiating said silane with ultraviolet radiation of sufficient intensity to photolyze said PH.sub.3, AsH.sub.3, and B.sub.2 H.sub.6, and (b) removing the photolysis products from said silane.

6. The method of claim 5 wherein said ultraviolet radiation is in the spectral range of 190 nm to 202 nm.

7. The method of claim 5 wherein said ultraviolet radiation is 193 nm radiation from an ArF laser.

8. The method of claim 5 wherein said silane is cooled before it is irradiated.
Other info:

Inventors: Clark, John H. (Los Alamos, NM, US)
Anderson, Robert G. (Los Alamos, NM, US)

Application Number: 865348
Filing Date: 1977-12-28
Publication_date: 1979-03-27
Assignee: The United States of America as represented by the United States (Washington, DC)
Primary Class(es): 204/158.21
Other Classes:
US Patent Ref:
Other Refs: Other References: ambartsumyan et al, Sov. J. Quantum Electron, vol. 7 No. 1 (Jan., 1977) pp. 96 & 97.