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Title:
Process for producing transparent electroconductive film
Abstract:
A transparent electroconductive film of lower resistance with a smaller content of remaining organic components and less pinholes than those of the conventional transparent electroconductive film is produced by applying a coating solution selected from (a) a coating solution comprising an inorganic indium compound free from a photosensitive group in the molecule or an inorganic tin compound free from a photosensitive group in the molecule, an organic ligand, and an organic solvent, (b) a coating solution comprising an organic indium compound free from a photosensitive group in the molecule, or an organic tin compound free from a photosensitive group in the molecule, and an organic solvent, and (c) the coating solution (a) or (b) further containing a dopant to the surface of a substrate, thereby forming a film thereon, and then irradiating the substrate with radiation capable of exciting organic groups, for example, ultraviolet rays in a state where the substrate is kept at a high temperature (100°-600° C.), and then baking the substrate at a high temperature.
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Inventors:
Okunaka, Masaaki (Fujisawa, JP)
Sudo, Ryoichi (Yokosuka, JP)
Yokono, Hitoshi (Yokohama, JP)
Isogai, Tokio (Fujisawa, JP)
Yamazaki, Mitsuo (Hitachi, JP)
Application Number:
06/215334
Filing Date: 1980-12-11 Publication_date: 1983-01-18 Assignee:
HITACHI LTD (JP)
HITACHI CHEMICAL CO LTD (JP)
Primary Class(es):
427/558
522/181, 427/383.100, 522/182, 427/521, 427/383.500, Other Classes:
C03C17/27; C23C18/12; C23C18/14; H05K1/09; H05K3/02; C03C17/23; C23C18/00; B05D3/06
US Patent Ref:
| 4098922 | July, 1978 | Dinella et al. | 427/54.1 | Method for depositing a metal on a surface | | 4135959 | January, 1979 | Luo et al. | 427/54.1 | Method of manufacture of flat panel display device | | 4239787 | December, 1980 | Rentschler | 427/54.1 | Semitransparent and durable photolithography masks |
Other Refs:
Primary Examiner:
Smith, John D.
Assistant Examiner:
Bell, Janyce A.
Attorney:
Antonelli, Terry And Wands
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