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Title: RF Heating coil construction for stack of susceptors

Abstract: Arrangement for RF heating a stack of disc-like susceptor elements lying in parallel planes in which a coil surrounding the elements creates the RF field. The coil comprises a plurality of turns which are saddle-shaped and oriented so that a turn generates a field which inductively heats at least two of the susceptor elements and so that most elements are heated by fields created by at least two turns.


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Inventors: Miller, Edward A. (Morrisville, PA)

Application Number: 06/165740
Filing Date: 1980-07-03
Publication_date: 1982-07-13
Assignee: RCA CORP

Primary Class(es): 219/634 219/674, 118/725, 118/730, 219/652, 118/620, 427/543,
Other Classes: H05B6/02; C23C13/08; H05B6/40
US Patent Ref:
2469640May, 1949Gillespie219/10.79Method of and apparatus for forming stockings and the like
3031555April, 1962Ross et al.219/10.79Induction heating
3212858October, 1965Smith et al.219/10.49Apparatus for producing crystalline semiconductor material
3539759November, 1970Spiro et al.219/10.49RSUSCEPTOR STRUCTURE IN SILICON EPITAXY
3549847December, 1970Clark et al.219/10.49RGRAPHITE SUSCEPTOR
3699298October, 1972Briody219/10.49RMETHODS AND APPARATUS FOR HEATING AND/OR COATING ARTICLES
3845738November, 1974Berkman et al.219/10.49VAPOR DEPOSITION APPARATUS WITH PYROLYTIC GRAPHITE HEAT SHIELD
3980854September, 1976Berkman et al.219/10.49RGraphite susceptor structure for inductively heating semiconductor wafers
4062318December, 1977Ban et al.118/725Apparatus for chemical vapor deposition
4112285September, 1978Pan et al.219/10.79Induction heating using parallel electric/magnetic fields

Other Refs: DE2157135DE2201142
May, 1973118/728
July, 1973118/728
Other References: Journal of Crystal Growth, "Novel Reactor for High Volume Low-Cost Silicon Epitaxy", V. S. Ban, vol. 45 (1978), pp. 97-107.

Primary Examiner: Reynolds B. A.
Assistant Examiner: Leung, Philip H.
Attorney: Cohen, Samuel
Squire, William
Claims: