|
PatentVote.com: Vote on your favourite invention!
|
|
 |
Title: Method for inspecting electrical devices
Abstract:
A method of inspecting electrical devices such as integrated circuit devices which have conductors covered by a protective layer of passivating material to determine the quality of the protective layer includes treating the circuit with a fluorescein containing dye and exposing the treated device to UV radiation while applying a voltage between two conductors. Fluorescence is observable in well passivated areas of the device but not in unpassivated or inadequately passivated areas. When a device is tested before dicing from a wafer, adjacent devices to which no voltage is applied fluoresce in both passivated and unpassivated areas.
Other info: Inventors: Deckert, Cheryl A. (Lawrenceville, NJ, US) Comizzoli, Robert B. (Belle Mead, NJ, US) Schnable, George L. (Lansdale, PA, US) Application Number: 051168 Filing Date: 1979-06-22 Publication_date: 1980-12-02 Assignee: RCA Corporation (New York, NY) Primary Class(es): 250/302 250/461.1, 324/501, 324/537 Other Classes: US Patent Ref:
Other Refs: Other References: "Dye Lasers" by F. P. Schafer, pp. 164-166, published in Topics in Applied Physics, vol. #1. | |