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Primary Examiner: Munson, Gene M.
Assistant Examiner:
Attorney: Walter, Jr.; Howard J.

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Title: V-Groove charge-coupled device

Abstract: A charge-coupled device shift register is formed in V-grooves provided by anisotropically etching in a substrate. insulated conductive electrodes are provided perpendicular to the V-grooves to form a plurality of parallel shift registers which transfer charges along the length of the V-grooves.


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Inventors: Vanderslice, Jr., Wilbur B. (Burlington, VT, US)

Application Number: 041975
Filing Date: 1979-05-24
Publication_date: 1980-11-18
Assignee: International Business Machines Corporation (Armonk, NY)
Primary Class(es): 257/244 257/243, 257/249, 257/E29.058, 257/E29.237, 377/63
Other Classes:
US Patent Ref:
4070690Jan, 1978Wickstrom357/55.
4126881Nov, 1978von Basse et al.357/55.

Other Refs: Other References: Kosonocky "Charge-Coupled Devices-An Overview" 1974 Western Electronics Show and Convention Tech. Papers, vol. 18 (9/74), pp. 2/1-2/20.
Bean "Anisotropic Etching of Silicon" IEEE Trans. Electron Devices, vol. ED-25 (10/78), pp. 1185-1193.
Liu "V-Grooved Charge-Coupled Device" IBM Tech. Disclosure Bulletin, vol. 20 (3/78), p. 3851.
Kenney "V-Groove Charge-Coupled Device" IBM Tech. Disclosure Bulletin, vol. 21 (1/79), p. 3110.