Title: Magnetic lens system for corpuscular radiation equipment

Abstract: A magnetic lens system for corpuscular radiation equipment operating in a vacuum, in particular, an objective lens system for electron microscopes, comprising a superconducting shield housing, in which are arranged, at one end, a single hollow cylindrical superconducting shielding device, wound with a lens coil, and at the other end, in front of the free end face of the shielding device, a vacuum chamber for accommodating an object to be examined, permitting the cavity to be relatively large, and detectors for radiation analysis to be arranged therein so that the lens system is therefore suitable for use in scanning electron microscopes.

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Inventors: Dietrich, Isolde (Munich, DE, US)
Fox, Fred (Munich, DE, US)
Knapek, Erwin (Unterhaching, DE, US)
Nachtrieb, Karl (Munich, DE, US)
Weyl, Reinhard (Assling, DE, US)
Zerbst, Helmut (Munich, DE, US)
Lefranc, Guy (Munich, DE, US)

Application Number: 890922
Filing Date: 1978-03-28
Publication_date: 1980-07-22
Assignee: Siemens Aktiengesellschaft (Munich, DE)
Primary Class(es): 250/396ML 250/397, 505/871
Other Classes:
US Patent Ref:

3008044	Nov, 1961	Buchhold	250/396.
3351754	Nov, 1967	Dietrich et al.	250/396.
3916201	Oct, 1975	Herrmann et al.	250/396.
3942005	Mar, 1976	Watanabe	250/310.

Other Refs:
Primary Examiner: Anderson, Bruce C.
Assistant Examiner:
Attorney: Kenyon & Kenyon