Title: Arrangement and photometer for measuring and controlling the thickness of optically active thin layers

Abstract: An arrangement and photometer for measuring and controlling the thickness of optically active thin layers wherein the axis of the measurement light beam coming from the measurement light source is directed to the measurement object and a referenced light receiver, independent of the optical properties of the measurement object, is associated with the measurement light beam. The output signal of the referenced light receiver is mixed with a trigger stage for a phase sensitive photometer amplifier and is fed to a compensation circuit for the equilization of brightness variations in the measurement light source.

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Inventors: Schwiecker, Horst (Kahl am Main, DE, US)
Thorn, Gernot (Hanau am Main, DE, US)
Ehrl, Hans-Peter (Aufkirchen, DE, US)

Application Number: 807290
Filing Date: 1977-06-16
Publication_date: 1980-06-17
Assignee: Leybold-Heraeus GmbH & Co. KG (DE)
Primary Class(es): 118/664 118/698, 118/712, 118/715
Other Classes:
US Patent Ref:

3526460	Sep, 1970	Webb	118/9.
4024291	May, 1977	Wilmanns	118/8.

Other Refs: 10799201387607

Apr, 1960	DE
Mar, 1975	GB.

Primary Examiner: McIntosh, John P.
Assistant Examiner:
Attorney: Sprung, Felfe, Horn, Lynch & Kramer