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Primary Examiner: Esposito, Michael F.
Assistant Examiner:
Attorney: Watson, Cole, Grindle & Watson

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Title: Method of applying an antireflective coating to a solar cell

Abstract: A tantalum oxide antireflective coating is applied to a surface of a solar energy cell by depositing a layer of a suboxide of tantalum on the surface and then oxidizing the layer to an oxide approaching Ta.sub.2 O.sub.5.

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Other info:

Inventors: Lindmayer, Joseph (Bethesda, MD, US)

Application Number: 838093
Filing Date: 1977-09-30
Publication_date: 1980-05-06
Assignee: Solarex Corporation (Rockville, MD)
Primary Class(es): 438/72 136/256, 257/437, 427/74, 427/126.3, 427/162, 427/255.36, 427/255.4, 427/343, 427/377, 427/566, 438/785
Other Classes:
US Patent Ref:

3533850	Oct, 1970	Tarneja et al.	136/89.
3904453	Sep, 1975	Revesz et al.	136/89.
3922774	Dec, 1975	Lindmayer et al.	136/89.

Other Refs: Other References: Revesz, Vitreous Oxide . . . Solar Cells, IEEE Photospecialists' Conf., (11-1973), pp. 180-181.
Revesz et al., Film Substrate . . . Si/Ta.sub.2 O.sub.5 Structures, J. Electrochemical, vol. 123 (10-1976), pp. 1514-1519.