Title: Apparatus for detecting the position of fine object

Abstract: To detect the position and inclination of an IC pellet with two position marks on its surface, the following steps are taken. First, an image of the IC pellet is focussed on the photosensitive surface of a television camera. Then, the photosensitive surface with said image is scanned with a small raster, thereby detecting the coordinate of a first position mark. Thereafter, the scanning raster is shifted to the second position mark and scans the same, thereby detecting the coordinate of the second position mark. A coordinate signal which corresponds to the detected coordinates of the first and second position marks is fed into an arithmetic operation device, which computes the central coordinate and angle of inclination of the IC pellet.

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Inventors: Arimura, Yoshiaki (Yokohama, JP)

Application Number: 858331
Filing Date: 1977-12-07
Publication_date: 1980-01-29
Assignee: Tokyo Shibaura Electric Co., Ltd. (Kawasaki, JP)
Primary Class(es): 348/87 377/17
Other Classes:
US Patent Ref:

3603728	Sep, 1971	Arimura	358/101.
4044377	Aug, 1977	Bowerman	358/107.

Other Refs:
Primary Examiner: Britton, Howard W.
Assistant Examiner:
Attorney: Finnegan, Henderson, Farabow & Garrett