Title: Production of inhomogeneous films by sequential layers of homogeneous films

Abstract: The present invention directed to antireflective coatings presents a new method for producing graded index films from alternating very thin layers of two materials with proper but differing indices. During deposition the thickness of each of the many layer pairs deposited can remain fairly uniform while the layer thickness of the two materials making up each pair is adjusted so that the resulting average index matches the index of the desired profile for that part of the total thickness. A two source evaporation deposition system is used and the two materials may be, for example, thallium iodide and lead fluoride.

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Inventors: Moravec, Thomas J. (Eden Prairie, MN, US)
Skogman, Richard A. (Minneapolis, MN, US)

Application Number: 963550
Filing Date: 1978-11-24
Publication_date: 1979-11-27
Assignee: Honeywell Inc. (Minneapolis, MN)
Primary Class(es): 427/160 427/162, 427/164
Other Classes:
US Patent Ref:

3959548	May, 1976	Bernal	427/164.
4009300	Feb, 1977	Chaffin	427/162.
4110489	Aug, 1978	Chaffin et al.	427/160.

Other Refs:
Primary Examiner: Hoffman, James R.
Assistant Examiner:
Attorney: Dahle; Omund R.