Title: Apparatus for the electrodeposition of aluminum

Abstract: Above the electroplating trough, a lock chamber is arranged which can be flooded with protective gas and is subdivided by means of an intermediate door into an outer chamber and a main chamber. The outer chamber has an outer lock door while the main chamber is connected to the electroplating trough by an inner lock opening. In addition, a work piece transfer device is provided which can be moved between the outer chamber and the main chamber and can be operated from the outside.

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Inventors: Stoger, Klaus (Nuremburg, DE, US)
Dotzer, Richard (Nuremburg, DE, US)
Stadter, Josef (Erlangen, DE, US)
Gehring, Johann (Spardorf, DE, US)

Application Number: 896378
Filing Date: 1978-04-14
Publication_date: 1979-11-27
Assignee: Siemens Aktiengesellschaft (Munich, DE)
Primary Class(es): 204/200 204/199, 204/212
Other Classes:
US Patent Ref:

2085730	Jul, 1937	Cox et al.	204/200.
2326707	Aug, 1943	Thomas et al.	204/199.
2448116	Aug, 1948	Pearson et al.	204/200.
4003805	Jan, 1977	Schaer et al.	204/199.
4036725	Jul, 1977	Allen et al.	204/199.

Other Refs:
Primary Examiner: Prescott, Arthur C.
Assistant Examiner:
Attorney: Kenyon & Kenyon