Title: Method for forming a quartz crystal vibrator

Abstract: A quartz crystal tuning fork vibrator having thin conductive film side electrodes and a method of forming same is provided. The quartz crystal vibrator is provided with identically configured electrodes on both planar surfaces of the tuning fork tines with the electrodes being peripherally positioned along the respective lengthwise extents of the tines on both planar surfaces with thin conductive film electrodes being disposed on the lengthwise side surfaces of the tines in order to electrically couple the like configured electrodes peripherally disposed on the planar surfaces to each other. The quartz crystal plate and the electrodes formed on the opposed planar surfaces of the tines are formed by photo-etching, whereafter the planar surfaces are masked and a thin conductive film is sputtered on the lengthwise edges to form the electrodes on the side surfaces.

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Inventors: Negita, Mutsumi (Minowa, JP)

Application Number: 900222
Filing Date: 1978-04-26
Publication_date: 1979-11-27
Assignee: Matsushima Kogyo Kabushiki Kaisha (Tokyo, JP)
Primary Class(es): 204/192.15 29/25.35
Other Classes:
US Patent Ref:

4099078

Jul, 1978

Shibata et al.

310/361.

Other Refs:
Primary Examiner: Weisstuch, Aaron
Assistant Examiner:
Attorney: Blum, Kaplan, Friedman, Silberman and Beran