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Primary Examiner: Nase, Jeffrey V.
Assistant Examiner:
Attorney: Murray; James E.

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Title: Pneumatic control of the motion of objects suspended on an air film

Abstract: This specification deals with the stopping, positioning, orienting and redirecting a semiconductor wafer being transported along a track on an air film or bed of air. The stopping mechanism is an air jet located in a groove in the track, wafers passing over this air jet on an air film are sensed by a pneumatic sensor that turns on the air jet to set up an air stream under the transporting surface of the air film. This air stream sucks the fluid in the air film along with it in the groove causing a vacuum in the bed in the area of the nozzle of the air jet. The wafers are then stopped by the suction of the vacuum. Positioning, orienting and redirecting is done using the air jet and pneumatic sensor in combination with special air jet arrangements and operations.

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Other info:

Inventors: Hassan, Javathu K. (Hopewell Junction, NY, US)
Paivanas, John A. (Hyde Park, NY, US)

Application Number: 772394
Filing Date: 1977-02-28
Publication_date: 1979-08-21
Assignee: International Business Machines Corporation (Armonk, NY)
Primary Class(es): 406/10 104/23.2, 104/134, 188/356, 226/196.1, 242/615.11, 271/183, 271/195, 406/84, 406/87
Other Classes:
US Patent Ref:

3158367	Nov, 1964	Tarbuck	271/97.
3285608	Nov, 1966	Lyman	271/195.
3796466	Mar, 1974	Lasch	302/29.
3933351	Jan, 1976	Mayer et al.	271/183.
3976329	Aug, 1976	Adams et al.	302/2.
4081201	Mar, 1978	Hassan et al.	302/2.

Other Refs: Other References: IBM Technical Disclosure Bulletin; vol. 16, No. 2; Jul. 1973; "Air Track Buffer" by Babinski; pp. 469-470.
IBM Technical Disclosure Bulletin; vol. 18, No. 2; Jul. 1975; "Back Pressure Sense Circuit" by Appenzeller; pp. 422-424.