Title: Humidity sensing element and method of manufacture thereof

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Abstract: A doped capacitance humidity sensing element and method of manufacture thereof is provided. The element has a response time in the order of one second and has one electrode formed by an anodizable metal, an anodized layer thereon, conductive, metal atoms deposited in non-short-circuiting mutual relation in the interstices of the anodized layer, the anodized coating layer sealed to contact the particles with an ion-forming material and reduce the porosity of the coating, and a second electrode formed by a moisture-vapor-pervious, electron-conductive layer of metal deposited on the sealed anodized coating on the opposite side from the first electrode, the anodized coating layer being generally pervious to the surrounding gaseous atmosphere and the moisture vapor thereof and the capacitance element presenting an impedance to low frequency sine wave electrical excitation varying inversely and generally proportionally to the relative humidity of the surrounding gaseous atmosphere.


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