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Title:
Carrier for semiconductive wafers
Abstract:
A carrier having a plurality of transport channels arranged in stacked parallel relationship for receiving semiconductive wafers is provided with a pair of oppositely facing recessed regions extending partially into the transport channels. In each of these recessed regions a separate spring-loaded stop member is pivotally mounted for automatic movement to a raised inoperative position, where itis pivoted out of the transport channels to permit passage of the semiconductive wafers therethrough, when the carrier is set down, and for automatic movement to a lowered operative position, where it is pivoted into the transport channels to block passage of the semiconductive wafers therethrough and thereby impede spillage of any semiconductive wafers contained in the carrier, when the carrier is picked up. Each stop member coacts with a separate cam housing to provide a self-locking mechanism that is automatically operable for preventing the semiconductive wafers from moving the stop members to the raised inoperative position when the carrier is picked up and that is automatically released when the carrier is set down.
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Inventors:
Hofmeister, Lucien (Mountain View, CA, US) Schulte, Harvey L. (Los Altos, CA, US)
Application Number:
915277
Filing Date: 1978-06-13 Publication_date: 1979-05-08 Assignee:
Kasper Instruments, Inc. (Sunnyvale, CA)
Primary Class(es):
211/41.18
118/500, 206/454, 206/832, 294/87.1, 432/258
Other Classes:
US Patent Ref:
Other Refs:
Primary Examiner:
Frazier, Roy D.
Assistant Examiner:
Gibson, Jr., Robert W.
Attorney:
Griffin; Roland I.
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