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Primary Examiner: Williams, Howard S.
Assistant Examiner:
Attorney: Carlson; Dean E., Waltersheid; Edward C.

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Title: Purification of silane via laser-induced chemistry

Abstract: Impurities such as PH.sub.3, AsH.sub.3, and B.sub.2 H.sub.6 may be removed from SiH.sub.4 by means of selective photolysis with ultraviolet radiation of the appropriate wavelength. An ArF laser operating at 193 nm provides an efficient and effective radiation source for the photolysis.

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Inventors: Clark, John H. (Los Alamos, NM, US)
Anderson, Robert G. (Los Alamos, NM, US)

Application Number: 865348
Filing Date: 1977-12-28
Publication_date: 1979-03-27
Assignee: The United States of America as represented by the United States (Washington, DC)
Primary Class(es): 204/158.21
Other Classes:
US Patent Ref:
Other Refs: Other References: ambartsumyan et al, Sov. J. Quantum Electron, vol. 7 No. 1 (Jan., 1977) pp. 96 & 97.