Title: Absolute humidity sensors and methods of manufacturing humidity sensors

Abstract: Disclosed are humidity sensor structures, and fabrication techniques, which result in uniform and reliable humidity sensing, reliable electrical connections in small sensors, and simplified and inexpensive manufacture.

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Inventors: Kovac, Michael G. (Sudbury, MA, US)
Chleck, David J. (Brookline, MA, US)
Goodman, Philip (Lexington, MA, US)

Application Number: 764394
Filing Date: 1977-01-31
Publication_date: 1979-03-06
Assignee: Panametrics, Inc. (Waltham, MA)
Primary Class(es): 427/79 73/335.05, 324/687, 338/35, 427/80, 427/102, 427/103
Other Classes:
US Patent Ref:

3121853	Feb, 1964	Jason et al.	338/35.
3477055	Nov, 1969	Herbst et al.	427/103.
3523244	Aug, 1970	Goodman et al.	338/35.
3622385	Nov, 1971	Stork	427/90.
3681134	Aug, 1972	Nathanson et al.	427/89.
3751292	Aug, 1973	Kongable	427/89.
3987676	Oct, 1976	Bennewitz	338/35.

Other Refs:
Primary Examiner: Pitlick, Harris A.
Assistant Examiner:
Attorney: Kenway & Jenney