Title: Method for irradiating a specimen by corpuscular-beam radiation

Abstract: A method for irradiating a specimen by corpuscular-beam radiation in which an irradiated surface pattern including isolated areas unexposed to the corpuscular beam surrounded at least almost completely by areas exposed to the beam is generated on a specimen by first imaging a mask which is supported by a support grid comprising a plurality of parallel strips and having a pattern corresponding to the surface pattern to be generated, on the specimen by shadow projection by means of a corpuscular beam consisting of a plurality of parallel rays. The image of the supporting grid is then removed by tilting the corpuscular beam in a direction perpendicular to the longitudinal axis of the strips forming the support grid through an angle which is at least equal in radians to the ratio of the width of the strips to the distance between the mask and the specimen.

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Inventors: Anger, Klaus (Berlin, DE, US)
Lischke, Burkhard (Berlin, DE, US)
Oelmann, Andreas (Berlin, DE, US)
Reschke, Helmut (Berlin, DE, US)

Application Number: 732645
Filing Date: 1976-10-15
Publication_date: 1979-01-23
Assignee: Siemens Aktiengesellschaft (Munich, DE1)
Primary Class(es): 250/492.2 250/398
Other Classes:
US Patent Ref:

3770934	Nov, 1973	Randmer	219/121.
3914608	Oct, 1975	Malmberg	250/492.
3924136	Dec, 1975	Heynick et al.	250/492.
4021674	May, 1977	Koops	250/492.

Other Refs:
Primary Examiner: Anderson, Bruce C.
Assistant Examiner:
Attorney: Kenyon & Kenyon, Reilly, Carr & Chapin