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Title:
Photoelectric grating displacement measuring apparatus
Abstract:
A measuring system includes a scale grating carried on one of two relatively movable bodies and an index grating carried on the other. The scale grating is illuminated directly in such a way that light passing from it to the index grating is at least partially diffuse. Detector means are provided to respond to the resulting spatially periodic distribution of illumination.
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Inventors:
Brake, David George (Welwyn Garden City, EN)
Application Number:
716229
Filing Date: 1976-08-20 Publication_date: 1978-03-14 Assignee:
Ferranti Limited (Hollinwood, EN)
Primary Class(es):
250/237G
356/619
Other Classes:
US Patent Ref:
Other Refs:
Primary Examiner:
Helms, David C.
Assistant Examiner:
Attorney:
Cameron, Kerkam, Sutton, Stowell & Stowell
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