Title: Photomask dryer

Abstract: The dryer is used for drying developed photomasks of the type used in manufacturing integrated circuit devices. The dryer provides a continuous flow of very clean, warm, dry air over photomasks placed in it to dry. The dryer comprises a box having a series of distributor tubes extending into it. Drying racks holding photomasks hang from the distributor tubes and heated, filtered air flows from at least one slot in the distributor tube over the wet photomasks to dry them.

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Inventors: Geshner, Robert Andrew (Warren, NJ, US)
Sciambi, Louis Joseph (Philadelphia, PA, US)

Application Number: 718805
Filing Date: 1976-08-30
Publication_date: 1978-01-17
Assignee: RCA Corporation (New York, NY)
Primary Class(es): 34/239 34/240, 392/382
Other Classes:
US Patent Ref:

500634	Jul, 1893	Tymeson	34/240.
758451	Apr, 1904	Judelson	34/240.
1018037	Feb, 1912	Dunham	34/239.
2209054	Jul, 1940	Doud et al.	34/243.
2598603	May, 1952	Richtarsic	55/523.
2668368	Feb, 1954	Jacobs	34/239.
2782526	Feb, 1957	Cota	34/DIG.
2917179	Dec, 1959	Casey et al.	211/40.
3069002	Dec, 1962	Hart	206/455.
3206868	Sep, 1965	Bascom	98/40.
3306794	Feb, 1967	Humber, Jr.	55/510.

Other Refs:
Primary Examiner: Camby, John J.
Assistant Examiner: Yuen, Henry C.
Attorney: Christoffersen; H., Williams; R. P., Asman; Sanford J.