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Title:
Humidity sensor
Abstract:
A humidity sensor comprising a pair of spaced electrodes on an insulating substrate is formed by coating an orthophosphate as a sensitive membrane over at least a portion of the gap between the electrodes.
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Inventors:
Nagano, Kentaro (Yokohama, JA) Nomaki, Koji (Yokohama, JA) Kutsukake, Yukinori (Tokyo, JA) Nanao, Junji (Yokohama, JA)
Application Number:
686293
Filing Date: 1976-05-14 Publication_date: 1977-10-04 Assignee:
Asahi Glass Company Ltd. (Tokyo, JA)
Primary Class(es):
338/35
200/61.06, 219/522, 252/519.5, 252/521.5
Other Classes:
US Patent Ref:
Other Refs:
Primary Examiner:
Albritton, C. L.
Assistant Examiner:
Attorney:
Oblon, Fisher, Spivak, McClelland & Maier
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