Home

Primary Examiner: Ruehl, Charles A.
Assistant Examiner:
Attorney: Craig & Antonelli

Next ten patents ordered by date:

Pressure gauge
Remotely actuated sampling apparatus
Pipette aspirator device
Centrifugal weights orienting system
Sidereal rate drive mechanism for a telescope mount
Linear actuator
Transmission mechanisms
Multi V-grooved pulley structure and method of making same
Belting
Pintle-type industrial conveyor chain

Translate:
En
De
Es
Fr
It
Pt
Ja
Ko
Zh

Title: Semiconductor pressure transducer

Abstract: A semiconductor pressure transducer comprises a circular diaphragm formed of a single crystal semiconductor material, at least a first strain gauge element having a piezoresistance effect and formed by injecting an impurity into the diaphragm in a linear region extending in parallel with a predetermined axis which extends transversely of the surface of the diaphragm, at least a second strain gauge element having the piezoresistance effect and formed by injecting an impurity into the diaphragm in a linear region extending in the direction perpendicular to the axis, and means for securing the diaphragm at the outer peripheral portion thereof. The distance between the second strain gauge element and the center of the diaphragm is differed from the distance between the center of the first strain gauge element and the latter.

Do you think this is a good invention? Vote now:

Votes so far: For:(0) Against:(0)
Other info:

Inventors: Shimada, Satoshi (Hitachi, JA)
Yamada, Kazuji (Hitachi, JA)
Matsuda, Yasumasa (Hitachi, JA)
Kimura, Ichiro (Mito, JA)
Shimazoe, Michitaka (Hitachi, JA)
Takahashi, Yukio (Katsuta, JA)

Application Number: 692368
Filing Date: 1976-06-03
Publication_date: 1977-09-27
Assignee: Hitachi, Ltd. (JA)
Primary Class(es): 73/727 73/765, 338/4
Other Classes:
US Patent Ref:

3071745	Jan, 1963	Stedman	73/398.
3456226	Jul, 1969	Vick	73/88.
3537319	Nov, 1970	Yerman	338/4.
3641812	Feb, 1972	Vick	73/88.
3772628	Nov, 1973	Underwood et al.	73/88.

Other Refs: Other References: V. Vaganov et al. "Properties of Diffusion Strain-Gauge Resistances of Pressure Transducers with Silicon Diaphragms"-Measurement Techniques-Dec. 1973.