Title: Humidity sensor, material therefor and method

Abstract: A novel humidity sensor printed and fired on a dielectric substrate comprising an interdigitated pattern of a conductive precious metal with cobalt oxide as the only binder. Sensors according to the invention may be employed as hermeticity detectors in semiconductor packages.

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Inventors: Frazee, Lawrence E. (Norfolk, NB)

Application Number: 747246
Filing Date: 1976-12-02
Publication_date: 1977-09-20
Assignee: Plessey Incorporated (Melville, NY)
Primary Class(es): 338/35 29/610.1, 29/621, 200/61.06, 252/513, 252/514, 252/520.3, 252/521.2, 257/414, 422/98
Other Classes:
US Patent Ref:

3345596	Oct, 1967	Delaney et al.	338/35.
3380835	Apr, 1968	Short	252/514.
3408311	Oct, 1968	Short	252/514.
3553109	Jan, 1971	Hoffman	252/514.
3823093	Jul, 1974	Amin	252/514.
3838071	Sep, 1974	Amin	252/514.
3890703	Jun, 1975	Frazee et al.	338/35.
3906426	Sep, 1975	Frazee et al.	338/35.
3943557	Mar, 1976	Frazee et al.	357/75.
3961301	Jun, 1976	Fraioli	200/61.

Other Refs:
Primary Examiner: Albritton, C. L.
Assistant Examiner:
Attorney: Burke; James J.