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Title:
Device for discharging static electricity
Abstract:
A device to discharge substrates loaded with static electricity by means of an electric glow discharge generated between isolated high voltage electrodes and exposed needle electrodes connected to a grounded collector bar is characterized by the fact that the high voltage electrodes are formed as concentric closed rings conductively connected to each other and disposed in spaced coaxial relationship with the needle electrodes. The grounded collector bar is formed as a hollow chamber into which compressed air may be introduced and directed into the space between the ring electrodes and the needle electrodes associated therewith to perform a cleaning operation and aid in directing ions toward the substrate to be discharged.
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Inventors:
Brennecke, Hermann (61 Darmstadt, DT)
Application Number:
713237
Filing Date: 1976-08-10 Publication_date: 1977-09-13 Assignee:
Primary Class(es):
361/213
361/222
Other Classes:
US Patent Ref:
Other Refs:
1,930,465| Aug, 1970 | DT | | 123,266Jan, 1959 | SU | | | | | | | |
Primary Examiner:
Goldberg, Gerald
Assistant Examiner:
Attorney:
Craig & Antonelli
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