Title: Workpiece handling system for vacuum processing

Abstract: Apparatus and method are disclosed for transporting discrete workpieces between the outside and inside of a pressure sealable chamber, such as a chamber under vacuum. At least one pressure lock is attached to the chamber and separated therefrom by a gate valve. The lock includes a door with associated means for receiving supporting and transporting a workpiece or a workpiece carrier. Means for conveying the workpiece between the lock and the chamber, as well as means for receiving and supporting the carrier in the chamber are disclosed. The apparatus allows a carrier to be mounted on the open door so that the carrier is automatically transported into the lock as the door is closed. The lock is evacuated while the door and the gate are closed and then the gate is opened to allow the carrier to be conveyed into the chamber.

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Inventors: Dorenbos, Frederick William (El Cerrito, CA, US)

Application Number: 624498
Filing Date: 1975-10-21
Publication_date: 1977-09-13
Assignee: Airco, Inc. (Montvale, NJ)
Primary Class(es): 414/217 118/719, 118/729, 118/733, 414/287, 414/935, 414/939
Other Classes:
US Patent Ref:

403687	May, 1889	Michales	104/89.
922070	May, 1909	Wallace et al.	104/102.
3125232	Mar, 1964	Brinkman et al.	214/17.
3192645	Jul, 1965	Oetjen et al.	198/19.
3469560	Sep, 1969	Bukkila et al.	118/49.
3521765	Jul, 1970	Kauffman et al.	214/17.
3568632	Mar, 1971	Cawthon	118/49.
3604362	Sep, 1971	Goirand	104/89.
3656454	Apr, 1972	Schrader	118/49.
3848728	Nov, 1974	Liebrick et al.	198/203.

Other Refs:
Primary Examiner: Sheridan, Robert G.
Assistant Examiner:
Attorney: Draegert; David A., Bopp; Edmund W.