Title: Electron microscope

Abstract: A condenses lens system condenses an elctron beam onto a specimen. The electron beam thus transmitted through the specimen is magnified by a magnifying lens system. The magnified electron beam is projected onto a fluorescent screen, and the image of the specimen is visually observed. The quantity of electrons per unit area in the magnified electron beam is detected by an electron beam detector. In response to the detected signal, the condenser lens system is controlled so as to make constant the quantity of electrons per unit area in the magnified electron beam.

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Inventors: Kamimura, Shoji (Katsuta, JA)
Saito, Yasushi (Mito, JA)

Application Number: 712664
Filing Date: 1976-08-09
Publication_date: 1977-08-30
Assignee: Hitachi, Ltd. (Tokyo, JA)
Primary Class(es): 250/311 250/397
Other Classes:
US Patent Ref:

3504176	Mar, 1970	Thon	250/311.
3558885	Jan, 1971	Flemming	250/311.
3937959	Feb, 1976	Namae	250/311.

Other Refs:
Primary Examiner: Church, Craig E.
Assistant Examiner:
Attorney: Beall & Jeffery