Title: Photoelectric microscope

Abstract: Description is made of improvements in a photoelectric microscope which is employed for the measurement of a very small distance. According to this invention, an optical system for making point-symmetric images is disposed in an optical path of an objective of a photoelectric microscope so as to form on an identical focal plane a pair of (two) images of a reference line (or mark) on a test piece which are in the relation of point symmetry to each other, and the distance between the pair of (two) images is measured, whereby the deviating distance of the reference line (or mark) on the test piece from the optic axis of the objective is evaluated. The distance between the pair of images is evaluated by gauging the time difference between two detection signals which are obtained by scanning the pair of images at equal speeds with photoelectric detectors.

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Inventors: Moriyama, Shigeo (Kokubunji, JA)
Kawamura, Yoshio (Kokubunji, JA)

Application Number: 695556
Filing Date: 1976-06-14
Publication_date: 1977-08-30
Assignee: Hitachi, Ltd. (JA)
Primary Class(es): 356/620 356/401
Other Classes:
US Patent Ref:

3038369	Jun, 1962	Davis	250/201.
3565532	Feb, 1971	Heitmann et al.	356/170.
3592545	Jul, 1971	Paine	356/167.
3876311	Apr, 1975	Sasayama	356/167.

Other Refs: 1,358,363

Mar, 1964	FR

Primary Examiner: Corbin, John K.
Assistant Examiner:
Attorney: Craig & Antonelli