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Title:
Method of fabricating diffraction grating masters and apparatus therefor
Abstract:
A method of producing a diffraction grating master which comprises exposing a plurality of reduced first grating patterns on a light sensitive layer in conformance with a predetermined code; processing the light sensitive layer to produce first gratings therein; exposing a plurality of reduced second grating patterns on the light sensitive layer (superimposed on the first gratings) and repeating the processing step to produce the second gratings; vacuum depositing a layer of silver on the superimposed first and second gratings; electroplating a layer of nickel on the silver layer on the superimposed gratings; separating the resulting nickel-silver layer from the light sensitive layer; and reinforcing the nickel-silver layer (formed in the pattern of the first and second gratings) for use as an embossing master. A special electroplating fixture used in the electroplating step insures that the nickel layer being deposited lies flat without "peeling".
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Inventors:
Horst, William R. (Dayton, OH, US) McNaughton, James L. (Kettering, OH, US) Mort, Charles F. (Xenia, OH, US)
Application Number:
611377
Filing Date: 1975-09-08 Publication_date: 1977-08-30 Assignee:
NCR Corporation (Dayton, OH)
Primary Class(es):
228/176
29/458, 264/2.5, 430/394
Other Classes:
US Patent Ref:
Other Refs:
Primary Examiner:
Jones, Jr., James L.
Assistant Examiner:
Ramsey, K. J.
Attorney:
Cavender; J. T., Sessler, Jr.; Albert L., Wargo; Elmer
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