Title: Humidity sensor with multiple electrode layers separated by a porous monolithic ceramic dielectric structure

Abstract: The invention concerns a humidity or moisture sensor, with a relatively thick sensitive monolithic ceramic volume. The sensitive volume is defined by a porous ceramic material with multiple electrodes buried therein in parallel planes which extend substantially entirely across two dimensions of the structure. Moisture entering the porous crystalline matrix is subjected to a high electric field giving rise to a current which is a function of the ambient moisture. By virtue of the inert ceramic surface and the buried precious metal electrodes, the device is sensitive, fast, yet electrically, chemically, thermally and mechanically stable.

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Inventors: Ross, Bernd (San Diego, CA, US)

Application Number: 685837
Filing Date: 1976-05-13
Publication_date: 1977-04-12
Assignee: Illinois Tool Works Inc. (Chicago, IL)
Primary Class(es): 338/35 338/325, 361/286, 361/321.4
Other Classes:
US Patent Ref:

3255324	Jun, 1966	Ovshinsky	338/34.
3916367	Oct, 1975	Nicholas et al.	338/35.

Other Refs:
Primary Examiner: Albritton, C. L.
Assistant Examiner:
Attorney: Bowen; Glenn W., Beart; Robert W.