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Title: Device for positioning substrate wafers

Abstract: A device for positioning substrate wafers with a flat zone on their periphery comprises a support in which a tilting member is tiltably mounted by means of a pinion. The tilting member is provided with two rollers rotatably seated thereon for guiding a belt in the longitudinal direction of said tilting member. At least one of said rollers is driven by a respective drive means. A support track is arranged on the longitudinal side of the tilting member for receiving said substrate wafers.


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Inventors: Jaksch, Erhard (Dresden, DL)

Application Number: 641708
Filing Date: 1975-12-22
Publication_date: 1976-12-14
Assignee: Jenoptik Jena G.m.b.H. (Jena, DL)
Primary Class(es): 414/728 198/394, 198/415, 414/757, 414/936
Other Classes:
US Patent Ref:
3297134Jan, 1967Pastuszak198/257.
3890508Jun, 1975Sharp198/257.

Other Refs:
Primary Examiner: Spar, Robert J.
Assistant Examiner: Abraham, George F.
Attorney: