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Primary Examiner: Kaplan, Morris
Assistant Examiner:
Attorney: Kelman; Kurt

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Title: Device for processing an organic high molecular weight film

Abstract: The invention disclosed relates to an improved method and apparatus for glow discharge treatment of organic high molecular weight film. When glow discharge treatment is effected in the presence of an organic monomer vapor, the deposit coating is found to be uniform throughout a wide area while being soluble in a particular organic solvent. The glow discharge region is modified by placing a screen member at the end of the glow region which is intermediate each glow discharge electrode and the substrate end associated therewith.


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Inventors: Horiguchi, Kazuo (Kyoto, JA)

Application Number: 663528
Filing Date: 1976-03-03
Publication_date: 1976-12-14
Assignee: Susumu Industrial Co., Ltd. (Kyoto, JA)
Primary Class(es): 118/723E 118/725
Other Classes:
US Patent Ref:
2540623Feb, 1961Law118/49.
3057792Oct, 1962Frohlich118/49.
3108900Oct, 1963Papp118/49.
3318790May, 1967Carbajal et al.427/41.
3324825Jun, 1967Brumfield118/49.
3329601Jul, 1967Mattox118/49.
3730696May, 1973Pointu et al.118/49.

Other Refs: 1,582,2977,89230,396
Aug, 1969FR
Jun, 1972JA
Jul, 1972JA
Other References: IBM Technical Disclosure Bulletin, "Electron Bombardment Evaporation," Engel, vol. 3, No. 6 (Nov. 1960), p. 12.