Title: Apparatus for the control of electrical heating of a semiconductor rod

Abstract: An arrangement for electrically heating a semiconductor rod which is simultaneously growing by means of materials deposited from a gas phase, wherein the heating current circuit is formed by a heating current source and an electronic switch which is controllable by a variable auxiliary voltage. The heating current is applied to a smoothing circuit by way of a rectifier circuit which is coupled with the heating current circuit. The initial voltage of the smoothing circuit is compared with a desired voltage and the difference voltage determined by this comparison serves to control the generator which supplies the auxiliary voltage. The smoothing circuit is coupled with a preamplifier whose output is connected with the movable tap of a potentiometer. A fixed terminal of the potentiometer is connected to a source which supplies the desired voltage and to the input of a subsequent control amplifier. Another fixed contact of the potentiometer is connected in a feedback circuit to the input of the preamplifier.

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Inventors: Stut, Hans (Groebenzell, DT)

Application Number: 299942
Filing Date: 1972-10-24
Publication_date: 1976-09-14
Assignee: Siemens Aktiengesellschaft (Berlin & Munich, DT)
Primary Class(es): 117/202 117/200, 323/234, 330/86, 330/108
Other Classes:
US Patent Ref:

3082381	Mar, 1963	Morrill et al.	330/86.
3373959	Mar, 1968	Petersen	330/86.
3378639	Apr, 1968	Dufendach et al.	330/16.
3577090	May, 1971	Montgomer, Jr.	330/151.
3602804	Aug, 1971	Randall	323/40.
3602833	Aug, 1971	Barnette	330/108.
3623140	Nov, 1971	Nercessian	323/40.
3700412	Oct, 1972	Higashi et al.	23/273.
3715651	Feb, 1973	Ott	323/4.

Other Refs:
Primary Examiner: Goldberg, Gerald
Assistant Examiner:
Attorney: Hill, Gross, Simpson, Van Santen, Steadman, Chiara & Simpson