Title: Humidity sensor

Abstract: The operation of relative humidity sensors made from cobalt oxide on a non-conductive ceramic substrate is improved by (1) providing a porous, sputtered overcoat of polytetrafluoroethylene which renders the sensor surface non-wettable without affecting other properties, and (2) providing a printed heating element on the back surface of the sensor, enabling in situ degassing of chemisorbed or adsorbed impurities and regeneration of a nascent sensor surface.

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Inventors: Fraioli, Anthony V. (Essen Fells, NJ, US)

Application Number: 426953
Filing Date: 1973-12-13
Publication_date: 1976-06-01
Assignee: Plessey Incorporated (Melville, NY)
Primary Class(es): 338/35 200/61.06
Other Classes:
US Patent Ref:

2083732	Jun, 1937	Moore et al.	219/361.
2543384	Feb, 1951	Squier	338/35.
2806991	Sep, 1957	White	338/34.
2979828	Apr, 1961	Westeren	219/361.
3345496	Oct, 1967	DeLaney et al.	338/35.
3478191	Nov, 1969	Johnson et al.	219/543.
3479257	Nov, 1969	Shaver	23/254.
3496336	Feb, 1970	Hingorany et al.	219/543.
3715702	Feb, 1973	Nicholas	338/35.
3868492	Feb, 1975	Taylor	219/203.

Other Refs:
Primary Examiner: Albritton, C. L.
Assistant Examiner:
Attorney: Burke; James J.