Title: Silicon carbide diffusion furnace components

Abstract: Process tube, paddle, and boat for a semi-conductor diffusion furnace composed of a matrix of high purity sintered silicon carbide which is made impervious to gases by impregnation thereof with silicon metal which is 99.9% pure. The process tube, paddle and boat provide the ultra pure environment needed for semi-conductor production and are highly resistant to the degradative effect of a great number of high temperature heating cycles.

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Inventors: Alliegro, Richard A. (Holden, MA, US)
Coes, Samuel H. (Northborough, MA, US)

Application Number: 530083
Filing Date: 1974-12-06
Publication_date: 1976-04-20
Assignee: Norton Company (Worcester, MA)
Primary Class(es): 432/253 206/454, 206/564, 432/258, 432/259
Other Classes:
US Patent Ref:

2784112	Mar, 1957	Nicholson	106/44.
3183130	May, 1965	Reynolds et al.	432/255.
3765300	Oct, 1973	Taylor	106/44.
3811829	May, 1974	Wesson	432/261.
3859399	Jan, 1975	Bailey	106/44.

Other Refs:
Primary Examiner: Camby, John J.
Assistant Examiner:
Attorney: Loiselle, Jr.; Arthur A.