Title: Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope

Abstract: A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images of the position detecting marks from the respective objects to reach a scanning mechanism, the scanning mechanism scanning the optical images at the same time, a plurality of detectors, each of which consists of a slit and a photoelectric element, the slits being arranged on an identical optical axis so that the optical images of the position detecting marks of the respective objects as scanned by the scanning mechanism may be detected respectively and individually, and a driving device which moves one of the plurality of objects on the basis of signals from the detectors, to effect the relative positioning of the plurality of objects.

Do you think this is a good invention? Vote now:

Votes so far: For:(0) Against:(0)
Other info:

Inventors: Matsumoto, Yoshio (Yokohama, JA)
Okamoto, Keiichi (Yokohama, JA)

Application Number: 480242
Filing Date: 1974-06-17
Publication_date: 1976-03-09
Assignee: Hitachi, Ltd. (JA)
Primary Class(es): 250/548 250/237R, 318/640, 356/139.07, 356/400, 356/401
Other Classes:
US Patent Ref:

3683195	Aug, 1972	Johannsmeier	250/237.
3739247	Jun, 1973	Yamaguchi et al.	250/200.
3744914	Jul, 1973	Gonda	250/233.
3796497	Mar, 1974	Mathisen et al.	356/152.
3809987	May, 1974	Suhr et al.	250/201.

Other Refs:
Primary Examiner: Borchelt, Archie R.
Assistant Examiner: La Roche, E. R.
Attorney: Craig & Antonelli