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Title: Semiconductor device with multi-layered metal interconnections

Abstract: Improved metal interconnections for a semiconductor device is described. The interconnections comprise a first metal layer, eg. aluminum, connected to the semiconductor, a second metal layer, eg. gold, for external connection, and a third metal layer interconnecting the first and second metal layers such that the junction areas of interconnection are laterally spaced from one another.


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Inventors: Gelsing, Richardus Johannes Henricus (Eindhoven, NL)
VAN Steensel, Kees (Eindhoven, NL)

Application Number: 888504
Filing Date: 1969-12-29
Publication_date: 1976-03-02
Assignee: U.S. Philips Corporation (New York, NY)
Primary Class(es): 257/751 257/736, 257/737, 257/E23.014, 257/E23.02, 257/E23.16
Other Classes:
US Patent Ref:
3335338Aug, 1967Lepselter317/234.
3429029Feb, 1969Lanjdon et al.29/589.
3430104Feb, 1969Burgess et al.317/101.
3436616Apr, 1969Jarrad317/234.
3480412Nov, 1969Duffe, Jr. et al.29/195.
3495324Feb, 1970Guthrie et al.29/578.
3501681Mar, 1970Weir317/234.
3518506Jun, 1970Gates317/234.
3569796Mar, 1971Mulfor, Jr.317/234.

Other Refs:
Primary Examiner: Larkins, William D.
Assistant Examiner:
Attorney: Trifari; Frank R., Oisher; Jack