Title: Scanning photoelectric microscope

Abstract: The present invention discloses a scanning photoelectric microscope in which a first reference object to be measured which is mounted on a stationary support is disposed relative to a second object to be measured which is disposed on a slidable table so as to form on both sides of the first object to be measured two indication intervals, which are caused to coincide with each other for alignment. The scanning photoelectric microscope according to the present invention comprises a scanning device for scanning an image reflected from the two indication intervals formed by the first and second objects to be measured at a constant speed to effect parallel displacement, a marker device for detecting positions of a scanned image corresponding to those of motion of the scanning device, and a circuit for detecting the two indication intervals detected by the scanning device in terms of time in response to a signal from the marker device, the second object to be measured being shifted until the two indication intervals coincide with each other.

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Inventors: Okamoto, Keiichi (Yokohama, JA)
Matsumoto, Yoshio (Yokohama, JA)
Oshima, Yasujiro (Tokyo, JA)

Application Number: 405269
Filing Date: 1973-10-11
Publication_date: 1976-03-02
Assignee: Hitachi, Ltd. (BOTH OF, JA); Oshima; Yasujiro (BOTH OF, JA)
Primary Class(es): 377/3 250/557, 356/400, 377/17
Other Classes:
US Patent Ref:

3299272	Jan, 1967	Furukawa	235/92.
3560097	Feb, 1971	Gavrilkin et al.	356/172.
3588462	Jun, 1971	Kreckel et al.	235/92.
3609307	Sep, 1971	Totsuka	235/92.
3614455	Oct, 1971	Paulus	250/557.
3678252	Jul, 1972	Payne	235/92.
3692413	Sep, 1972	Marcy et al.	356/172.
3731064	May, 1973	Berler	235/92.
3796497	Mar, 1974	Mathisen et al.	356/172.

Other Refs:
Primary Examiner: Thesz, Joseph M.
Assistant Examiner:
Attorney: Craig & Antonelli