Title: Glass passivated gold diffused SCR pellet and method for making

Abstract: Disclosed is an SCR pellet and a method for the fabrication thereof. A layer of oxide is grown on a semiconductor wafer that has been diffused to form a plurality of SCR pellets and openings are etched in the oxide at locations corresponding to each pellet. Gold is diffused through the openings into a preselected distribution in the base region to reduce turnoff time. Grooves are etched to facilitate glass passivation and division of the wafer into pellets.

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Inventors: Kennedy, Richard W. (Skaneateles, NY, US)
Tefft, Edward G. (Auburn, NY, US)

Application Number: 405489
Filing Date: 1973-10-11
Publication_date: 1976-03-02
Assignee: General Electric Company (Syracuse, NY)
Primary Class(es): 438/139 65/30.13, 148/DIG28, 148/DIG51, 148/DIG62, 257/156, 257/171, 257/626, 327/193, 438/543, 438/904
Other Classes:
US Patent Ref:

3275909	Sep, 1966	Gutzwiller	357/39.
3440113	Apr, 1969	Wolley	148/187.
3579815	May, 1971	Gentry	148/175.
3617398	Nov, 1971	Bilous et al.	148/175.
3640783	Feb, 1972	Bailey	148/186.
3701696	Oct, 1972	Mets	148/175.

Other Refs:
Primary Examiner: Rutledge, L. Dewayne
Assistant Examiner: Davis, J. M.
Attorney: Mooney; Robert J., Stoner; Douglas E.