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Primary Examiner: Rutledge, L. Dewayne
Assistant Examiner: Saba, W. G.
Attorney: Urbano; M. J.

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Title: Sn-Doped group III(a)-v(a) Ga-containing layers grown by molecular beam epitaxy

Abstract: In order to insure that the doping profiles of Sn-doped Group III(a)-V(a) Ga-containing layers grown by molecular beam epitaxy follow relatively closely the time-intensity profile of the dopant beam, the substrate temperature should not exceed about 550.degree.C.


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Inventors: Cho, Alfred Yi (New Providence, NJ, US)

Application Number: 563078
Filing Date: 1975-03-28
Publication_date: 1976-03-02
Assignee: Bell Telephone Laboratories, Incorporated (Murray Hill, NJ)
Primary Class(es): 117/105 117/108, 117/954, 148/DIG18, 148/DIG20, 148/DIG56, 148/DIG65, 148/DIG169, 252/62.3GA, 257/609, 257/E21.1
Other Classes:
US Patent Ref:
3612958Oct, 1971Saito et al.148/175.
3751310Aug, 1973Cho148/175.
3839084Oct, 1974Cho et al.148/175.

Other Refs: Other References: davey et al., "Epitaxial GaAs Films Deposited by Vacuum Evaporation," J. Applied Physics, Vol. 39, No. 4, Mar. 1968, pp. 1941-1948.
Cho et al., "Molecular Beam Epitaxy of GaAs, Al.sub.x Ga.sub.1.sub.-x As and GaP," 1970 Symposium on GaAs, Paper No. 2, pp. 18-29.
Cho et al., "Epitaxy of Silicon Doped Gallium Arsenide by Molecular Beam Method," Metallurgical Trans., Vol. 2, Mar. 1971, pp. 777-780.
Cho et al., "Properties of Schottky . . . GaAs . . . . . . Epitaxial Layers," J. Applied Physics, Vol. 45, No. 3, Mar. 1974, pp. 1258-1263.