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Title:
Method of and device for measuring life time of carriers of semiconductor
Abstract:
There is disclosed a method of and device for measuring characteristics of a semiconductor by way of a microwave. The variation with time in the concentration of carriers which are produced in the semiconductor by applying an energy thereto from an external energy source such as light source is measured by way of a reflected microwave of an incident microwave directed to a portion of the semiconductor through a tapering antenna, whereby the life time of carriers in the semiconductor is determined.
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Inventors:
Terasawa, Yoshio (Hitachi, JA)
Application Number:
491230
Filing Date: 1974-07-24 Publication_date: 1976-02-17 Assignee:
Hitachi, Ltd. (JA)
Primary Class(es):
324/767
324/642
Other Classes:
US Patent Ref:
Other Refs:
Primary Examiner:
Smith, Alfred E.
Assistant Examiner:
Karlsen, Ernest F.
Attorney:
Craig & Antonelli
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