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Primary Examiner: Lovell, C.
Assistant Examiner: Saba, W. G.
Attorney: Leitner, Palan & Martin

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Title: Process for forming monolithic semiconductor display

Abstract: A process for producing light emitting diodes is disclosed. In the process a major planar surface of a single crystal silicon wafer is modified to acceptably match the crystallographic lattice constant of a preselected electroluminescent single crystal semiconductor, such as gallium phosphide. The preselected electroluminescent semiconductor material is then epitaxially deposited in single crystal form on the modified surface of the silicon wafer, a step which is not feasible without the modification of the silicon wafer surface. Preferably, the modification is achieved by epitaxially depositing a thin layer of semiconductor material whose lattice structure offers, a substantially smaller disparity with the structure of the electroluminescent material than the existing disparity between the silicon wafer and the electroluminescent material.


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Inventors: Mason, Donald R. (Indialantic, FL, US)

Application Number: 369422
Filing Date: 1973-06-13
Publication_date: 1976-01-27
Assignee: Harris Corporation (Cleveland, OH)
Primary Class(es): 438/23 117/954, 117/955, 148/DIG26, 148/DIG67, 148/DIG72, 148/DIG85, 148/DIG119, 257/94, 257/190, 257/200, 257/E21.112, 257/E21.123, 438/37, 438/933
Other Classes:
US Patent Ref:
3275906Sep, 1966Matsukura et al.317/234.
3309553Mar, 1967Kroemer317/235.
3341376Sep, 1967Spenke et al.148/175.
3433684Mar, 1969Zanowick et al.117/106.
3433686Mar, 1969Marinace148/175.
3473978Nov, 1969Jackson et al.148/175.

Other Refs: Other References: Murray et al., "Lighting up in a Group" Electronics, Mar. 4, 1968, p. 104-110.
Blum et al., "Vapor Growth of Gap onto SiSubstrates" I.B.M. Tech. Discl. Bull., Vol. 13, No. 5, Oct. 1970, p. 1245.
Chang, I. F., "Fet-Bipolar Integration" Ibid., Vol. 14, No. 1, June 1971, p. 350-351.
Burmeister et al., "Epitaxial Growth of GaAs.sub.1.sub.-x O.sub.x on Germanium Substrates" Trans. Metallurgical Soc. Aime, Vol. 245, Mar. 1969, p. 565-569.