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Title:
Process for forming monolithic semiconductor display
Abstract:
A process for producing light emitting diodes is disclosed. In the process a major planar surface of a single crystal silicon wafer is modified to acceptably match the crystallographic lattice constant of a preselected electroluminescent single crystal semiconductor, such as gallium phosphide. The preselected electroluminescent semiconductor material is then epitaxially deposited in single crystal form on the modified surface of the silicon wafer, a step which is not feasible without the modification of the silicon wafer surface. Preferably, the modification is achieved by epitaxially depositing a thin layer of semiconductor material whose lattice structure offers, a substantially smaller disparity with the structure of the electroluminescent material than the existing disparity between the silicon wafer and the electroluminescent material.
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Inventors:
Mason, Donald R. (Indialantic, FL, US)
Application Number:
369422
Filing Date: 1973-06-13 Publication_date: 1976-01-27 Assignee:
Harris Corporation (Cleveland, OH)
Primary Class(es):
438/23
117/954, 117/955, 148/DIG26, 148/DIG67, 148/DIG72, 148/DIG85, 148/DIG119, 257/94, 257/190, 257/200, 257/E21.112, 257/E21.123, 438/37, 438/933
Other Classes:
US Patent Ref:
| 3275906 | Sep, 1966 | Matsukura et al. | 317/234. | | 3309553 | Mar, 1967 | Kroemer | 317/235. | | 3341376 | Sep, 1967 | Spenke et al. | 148/175. | | 3433684 | Mar, 1969 | Zanowick et al. | 117/106. | | 3433686 | Mar, 1969 | Marinace | 148/175. | | 3473978 | Nov, 1969 | Jackson et al. | 148/175. |
Other Refs:
Other References:
Murray et al., "Lighting up in a Group" Electronics, Mar. 4, 1968, p. 104-110. Blum et al., "Vapor Growth of Gap onto SiSubstrates" I.B.M. Tech. Discl. Bull., Vol. 13, No. 5, Oct. 1970, p. 1245. Chang, I. F., "Fet-Bipolar Integration" Ibid., Vol. 14, No. 1, June 1971, p. 350-351. Burmeister et al., "Epitaxial Growth of GaAs.sub.1.sub.-x O.sub.x on Germanium Substrates" Trans. Metallurgical Soc. Aime, Vol. 245, Mar. 1969, p. 565-569. |